Data for the plots is given in individual csv formatted files.  
File names include the energy of the particle considered, corresponding
to plots in the text.  In each file, the first column is the penetration
depth, given in nm in the case of keV energy ions and um in the case of 
MeV energy ions.  In all cases, the deposition is in units of 
(atoms/cm^3)/(atoms/cm^2)x1E4)